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Volumn 14, Issue 2, 2005, Pages 173-178
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Raman microscopic characterization of proton-irradiated polycrystalline diamond films
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Author keywords
Diamond film; Microelectromechanical Systems (MEMS); Radiation induced effects
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Indexed keywords
GRAIN SIZE AND SHAPE;
MICROELECTROMECHANICAL DEVICES;
MICROSTRUCTURE;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
POLYCRYSTALLINE MATERIALS;
RAMAN SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SINGLE CRYSTALS;
CRYSTAL SILICON;
MICROELECTROMECHANICAL SYSTEM (MEMS);
MICROSYSTEMS;
RADIATION-INDUCED EFFECTS;
DIAMOND FILMS;
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EID: 12444305391
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2004.09.008 Document Type: Article |
Times cited : (8)
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References (10)
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