Microreplicated RF toroidal inductor

IEEE Transactions on Microwave Theory and Techniques

Volumn 52, Issue 1 I, 2004, Pages 29-37

  Ermolov, Vladimir ^a   Lindström, Tomas ^b   Nieminen, Heikki ^a   Olsson, Mikael ^b   Read, Michael ^b   Ryhänen, Tapani ^a   Silanto, Samuli ^a   Uhrberg, Simon ^b  

^a NOKIA RESEARCH CENTER   (United States)

^b Dag Hammarskjöldsväg 52B   (Sweden)

Author keywords

Inductors; Micromachining; Plastics; RF microelectromechanical systems (MEMS); Transformer

Indexed keywords

ELECTRIC TRANSFORMERS; ELECTRIC VARIABLES MEASUREMENT; ELECTROMAGNETIC FIELDS; INDUCTANCE; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PLASTICS;

POLYMER REPLICATION PROCESS; THREE DIMENSIONAL LASER LITHOGRAPHY; THREE DIMENSIONAL ON-CHIP INDUCTORS;

ELECTRIC INDUCTORS;

EID: 1242330968     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2003.821236     Document Type: Article

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