Dynamic null lens for aspheric testing using a membrane mirror

Optics Communications

Volumn 233, Issue 1-3, 2004, Pages 15-19

  Pruss, C ^a   Tiziani, H J ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

Interferometry; Membrane mirror; Null test; Optical testing

Indexed keywords

ALGORITHMS; ALUMINUM; COATING TECHNIQUES; ELECTRODES; INTERFEROMETERS; INTERFEROMETRY; LIGHT PROPAGATION; MIRRORS; OPTICAL INSTRUMENT LENSES; OPTICAL SYSTEMS; OPTICAL TELESCOPES; OPTICAL TESTING; SILICON NITRIDE; SURFACE TESTING; WAVEFRONTS;

MEMBRANE MIRRORS; NULL TESTS;

ASPHERICS;

EID: 1242309789     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2004.01.030     Document Type: Article

References (6)

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6. Vdovin G. Adaptive Mirror Micromachined in Silicon. 1996;Delft University Press, Delft.