A versatile substrate heater for thermal and plasma-enhanced chemical-vapor deposition

Review of Scientific Instruments

Volumn 68, Issue 5, 1997, Pages 2149-2155

  Bottin, Jeffrey R ^a   McCurdy, Patrick R ^a   Fisher, Ellen R ^a  

^a Department of Environmental and Radiological Health Sciences   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1242290916     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148078     Document Type: Article

References (38)

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