Roughness and stability of silicon on insulator surfaces

Applied Physics Letters

Volumn 84, Issue 3, 2004, Pages 350-352

  Czubanowski, M ^a   Tegenkamp, C ^a   Ernst, W ^a   Pfnur H ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL DEFECTS; EVAPORATION; FERMI LEVEL; HETEROJUNCTIONS; INTERFACES (MATERIALS); LOW ENERGY ELECTRON DIFFRACTION; MATHEMATICAL MODELS; SCHOTTKY BARRIER DIODES; SILICA; SURFACE ROUGHNESS;

DEGREE OF METASTABILITY; ELECTRON BOMBARDMENT;

SILICON ON INSULATOR TECHNOLOGY;

EID: 1242265259     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1641181     Document Type: Article

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