Thick photoresist original master: A new tool for fabrication of polymeric optical waveguides with large core by hot embossing

Journal of Nonlinear Optical Physics and Materials

Volumn 13, Issue 3-4, 2004, Pages 513-517

  Mizuno, Hirotaka ^a   Sugihara, Okihiro ^a   Kaino, Toshikuni ^a   Ohe, Yuka ^b   Okamoto, Naomichi ^b   Hoshino, Masahito ^c  

^a TOHOKU UNIVERSITY   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

^c Tsuchiya Co Ltd   (Japan)

Author keywords

Hot embossing; Polymeric optical waveguide; Thick photoresist

Indexed keywords

EPOXY RESINS; OPTICAL FIBER FABRICATION; PHOTORESISTS; PLASTIC OPTICAL FIBERS; SILICONE RUBBER; SILICONES;

CURED EPOXY RESINS; FLATTENING PROCESS; HOT-EMBOSSING; LARGE-CORE SIZE; LOW COST FABRICATION; POLYMERIC OPTICAL WAVEGUIDES; RECTANGULAR GROOVE; THICK PHOTORESISTS;

OPTICAL WAVEGUIDES;

EID: 12344329455     PISSN: 02188635     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0218863504002183     Document Type: Conference Paper

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