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Electrochemical and Solid-State Letters

Volumn 8, Issue 1, 2005, Pages

Pt-doped Ru films prepared by CVD as electrodes for DRAM capacitors

(5) Kang, Sang Yeol a No, Sang Yong a Choi, Jung Hae a Hwang, Cheol Seong a Kim, Hyeong Joon a

a Seoul National University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; DOPING (ADDITIVES); DYNAMIC RANDOM ACCESS STORAGE; MIM DEVICES; PLATINUM; RUTHENIUM; THERMODYNAMIC STABILITY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

CARBON INCORPORATION; MECHANICAL DEFORMATION; PLASMA TREATMENT; POST-ANNEALING;

THIN FILMS;

EID: 12344305284 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.1830398 Document Type: Article

Times cited : (7)

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