Investigation of machine compliance uniformity for nanoindentation screening of wafer-supported libraries

Review of Scientific Instruments

Volumn 76, Issue 6, 2005, Pages

  Warren, Oden L ^a   Dwivedi, Arpit ^a   Wyrobek, Thomas J ^a   Famodu, Olugbenga O ^b   Takeuchi, Ichiro ^b  

^a Bruker Corporation   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MACHINE COMPLIANCE UNIFORMITY; NANOINDENTATION; TWEEZERS; VACUUM RINGS;

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; FEEDBACK CONTROL; HARDNESS; SILICON WAFERS; THIN FILMS; VACUUM;

INDENTATION;

EID: 12344276274     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1906089     Document Type: Article

References (12)

1. A. C. Fischer-Cripps, Nanoindentation (Springer, New York, 2004).
2. For a review article on the use of nanoindentation in combinatorial materials science, see O. L. Warren and T. J. Wyrobek, Meas. Sci. Technol. 16, 100 (2005).
3. K. Chondroudis, K. Cendak, E. Ramberg, and M. Devenney, " A combinatorial workflow for the rapid discovery and optimization of low dielectric constant materials., " presented at 2003 MRS Spring Meeting, Session E8, 21-25 April 2003, San Francisco, CA (abstract available at http://www.mrs.org/meetings/spring2003/program/AbstractBookE.pdf).
4. W. C. Oliver and G. M. Pharr, J. Mater. Res. 7, 1564 (1992).
5. ISO 14577-1:2002, ISO 14577-2:2002, and ISO 14577-3:2002 are ratified standards for instrumented indentation testing.
6. O. L. Warren, S. A. Downs, and T. J. Wyrobek, Z. Metallkd. 95, 287 (2004).
7. K. I. Schiffman and R. L. A. Küster, Z. Metallkd. 95, 311 (2004).
8. For a recent paper describing many aspects of nanoindentation-induced phase transformations in silicon, see J. E. Bradby, J. S. Williams, and M. V. Swain, Mater. Res. Soc. Symp. Proc. 750, Y8.24.1 (2003).
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11. T. F. Page, G. M. Pharr, J. L. Hay, W. C. Oliver, B. N. Lucas, E. Herbert, and L. Riester, Mater. Res. Soc. Symp. Proc. 522, 53 (1998).
12. J. J. Tuma, Handbook of Physical Calculations (McGraw-Hill, New York, 1983).