Plasma ion source with hollow cathode

Vacuum

Volumn 70, Issue 2-3, 2003, Pages 451-455

  Latuszynski A ^a   Drozdziel A ^a   Pyszniak, K ^a   Dupak, J ^b   Maczka D ^a   Meldizon, J ^c  

^a MARIA CURIE SK ODOWSKA UNIVERSITY   (Poland)

^b INSTITUTE OF SCIENTIFIC INSTRUMENTS   (Czech Republic)

^c LUBLIN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Hollow cathode; Ion source; Thermoemission source

Indexed keywords

CATHODES; ELECTRON EMISSION; IONIZATION; PLASMA SOURCES;

THERMOEMISSION SOURCES;

ION SOURCES;

EID: 12244297807     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00686-3     Document Type: Conference Paper

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