High resolution static SIMS imaging by time of flight SIMS

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 818-824

  Hoshi, T ^a   Kudo, M ^b  

^a ULVAC PHI Inc   (Japan)

^b SEIKEI UNIVERSITY   (Japan)

Author keywords

Aberration free imaging; Bunched imaging; TOF SIMS

Indexed keywords

ABERRATIONS; COMPOSITION; ION BEAMS; SECONDARY ION MASS SPECTROMETRY; SURFACE CHEMISTRY;

TIME OF FLIGHT (TOF);

IMAGING TECHNIQUES;

EID: 12244277031     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00834-6     Document Type: Conference Paper

References (34)

1. A. Wirth, S.P. Thompson, G. Gregory, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS VI, Wiley, New York, 1987, 639 pp.
2. A.R. Waugh, D.R. Kingham, M.J. Hearn, D.A. Briggs, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS VI, Wiley, New York, 1987, 231 pp.
3. S.J. Mullock, D.F. Reich, T. Dingle, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS VII, Wiley, New York, 1989, 847 pp.
4. J. Zehnpfenning, H.G. Cramer, T. Heller, U. Jurgen, E. Niehuis, J. Schwieters, A. Benninghoven, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS VIII, Wiley, New York, 1991, 501 pp.
5. J. Schwieters, H.G. Cramer, T. Heller, U. Jurgen, E. Niehuis, H. Rulle, J. Zehnpfenning, A. Benninghoven, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS VIII, Wiley, New York, 1991, 497 pp.
6. M.J. Heran, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS VIII, Wiley, New York, 1991, 297 pp.
7. P.M. Lindley, J.A. Chakel, R.W. Odom, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS VIII, Wiley, New York, 1991, 219 pp.
8. B. Schueler, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS VII, Wiley, New York, 1989, 311 pp.
9. B. Schueler, P. Sander, D. Reed, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS VII, Wiley, New York, 1989, 851 pp.
10. B. Schueler, R.W. Odom, J.A. Chakel, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS VIII, Wiley, New York, 1991, 281 pp.
11. Schueler B., Sander P., Reed D. Vacuum. 41:1990;1661.
12. S. Bryan, D.G. Watson, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS XI, Wiley, New York, 1997, 839 pp.
13. Briggs D., Hearn M.J., Fletcher I.W., Waugh A.R., McIntosh B.J. Surf. Interf. Anal. 15:1990;62.
14. H. Yanashima, K. Tanaka, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS IX, Wiley, New York, 1993, 183 pp.
15. L. Lianos, T.M. Duc, S. Reihlmaier, J. Hammond, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS IX, Wiley, New York, 1993, 468 pp.
16. M. Ferring, R. Gouttebaron, V. Cornet, Ph. Leclere, Ph. Dubios, R. Lazzaroni, M. Hecq, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS XII, Elsevier, Amsterdam, 1999, 769 pp.
17. Th. Gantenfort, T. Fladung, D. Wolany, L. Wiedmann, A. Benninghoven, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS XII, Elsevier, Amsterdam, 1999, 797 pp.
18. Belu A.M., Yang Z., Aslami R.A., Chilkoti A. Anal. Chem. 73:2001;143.
19. R.W. Odom, F.R.di. Brozolo, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS IX, Wiley, New York, 1993, 816 pp.
20. K. Takaya, H. Li, M. Okabe, T. Yoshida, J. Murakami, M. Tozu, T. Hoshi, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS XII, Elsevier, Amsterdam, 1999, 947 pp.
21. Ozaki Y. Nordic Pulp Paper Res. J. 4:1997;260.
22. Brinen J.S., Kulick R.J. Int. J. Mass Spectrom. Ion Process. 143:1995;177.
23. Belu A.M., Davies M.C., Newton J.M., Patel N. Ann. Chem. 72:2000;5625.
24. A.M. Belu, S. Bryan, M.C. Davies, N. Patel, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS XII, Elsevier, Amsterdam, 1999, 919 pp.
25. A. Karen, M. Nakamura, K. Okuno, F. Soeda, A. Ishitani, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS X, Wiley, New York, 1995, 189 pp.
26. T. Hoshi, M. Tozu, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS X, Wiley, New York, 1995, 477 pp.
27. E. Niehuis, T. Heller, C. Bendel, J. Zehnpfenning, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS XI, Wiley, New York, 1997, 777 pp.
28. E. Niehuis, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS X, Wiley, New York, 1995, 47 pp.
29. J. Zehnpfenning, E. Niehuis, H.-G. Cramer, T. Heller, R. Mollers, M. Terhorst, A. Schnieders, Z. Zhang, A. Benninghoven, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS IX, Wiley, New York, 1993, 561 pp.
30. S. Corcoran, P. Zimmerman, E. Niehuis, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS XII, Elsevier, Amsterdam, 1999, 21 pp.
31. H. Rulle, D. Rading, A. Benninghoven, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS X, Wiley, New York, 1995, 153 pp.
32. S. Bryan, F. Reich, B.W. Schueler, G. Marsh, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS X, Wiley, New York, 1995, 153 pp.
33. R. Kersting, A.P. Pijpers, B. Hagenhoff, R. Verlaek, D. Stepel, A. Benninghoven, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS XII, Elsevier, Amsterdam, 1999, 825 pp.
34. B. Hagenhoff, R. Kersting, D. Rading, S. Kayser, E. Miehuis, in: A. Benninghoven, et al. (Eds.), Secondary Ion Mass Spectrometry SIMS XII, Elsevier, Amsterdam, 1999, 833 pp.