A floating low energy electron gun (FLEG) for charge compensation in SIMS and other applications

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 343-347

  Gibbons, R ^a   Dowsett, M G ^a   Kelly, J ^a   Blenkinsopp, P ^b   Hill, R ^b   Richards, D ^a   Loibl, N ^c  

^a UNIVERSITY OF WARWICK   (United Kingdom)

^b IONOPTIKA LTD   (United Kingdom)

^c Atomika Instruments GmbH   (Germany)

Author keywords

Charge neutralization; FLEG; Low energy gun; SIMS

Indexed keywords

CURRENT DENSITY; ELECTRIC CURRENTS; ION BEAMS; ION BOMBARDMENT; MAGNETIC FIELDS; SECONDARY ION MASS SPECTROMETRY;

FLOATING LOW ENERGY GUNS (FLEG);

ELECTRON GUNS;

EID: 12244259676     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00673-6     Document Type: Conference Paper

References (4)

1. Wittmaack K. J. Appl. Phys. 50:1979;493.
2. M.G. Dowsett, N.S. Smith, R. Bridgeland, D. Richards, A.C. Lovejoy, P. Pedrick, in: A. Benninghoven, B. Hagenhoff, H.W. Werner (Eds.), Secondary Ion Mass Spectrometry, SIMS X, Wiley, New York, 1995, 367 pp.
3. Langmuir D.B. Proc. Inst. Radio Eng. 25:1937;977.
4. D.A. Dahl, Idaho National Engineering and Environmental Laboratory, Simion, Ineel-95/0403, February 2000.