Electron irradiation effect on depth profiling of a SiO 2 /Si(1 0 0) surface by Auger electron spectroscopy

Applied Surface Science

Volumn 241, Issue 1-2 SPEC. ISS., 2005, Pages 127-130

  Yakabe, T ^a   Fujita, D ^a   Yoshihara, K ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Adsorption; Auger electron spectroscopy; Depth resolution; Electron stimulated desorption; Ion sputtering rate

Indexed keywords

ADSORPTION; AUGER ELECTRON SPECTROSCOPY; DESORPTION; ELECTRON IRRADIATION; SPUTTERING; SURFACE PHENOMENA; THIN FILMS;

DEPTH PROFILING; DEPTH RESOLUTION; ELECTRON STIMULATED DESORPTION (ESD); ION SPUTTERING RATE;

SILICA;

EID: 12244254484     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.09.029     Document Type: Conference Paper

References (11)

1. M.P. Seah, and D. Briggs 2nd ed. Practical Surface Analysis vol. 1 1990 Wiley Chapter 1
2. M.L. Knotex, and P.J. Feibelman Phys. Rev. Lett. 40 1978 964
3. M.L. Knotex, and P.J. Feibelman Surf. Sci. 90 1979 865
4. C.G. Pantano, and T.E. Madey Appl. Surf. Sci. 7 1981 115
5. O.V. Rakhovskaya, S.S. Elovikov, E.M. Dubinina, E.S. Shakhurin, and A.P. Dementjev Surf. Sci. 274 1992 190
6. S. Thomas J. Appl. Phys. 45 1974 161
7. R.E. Kirby, and D. Lichtman Surf. Sci. 41 1974 447
8. J. Ahn, C.R. Perleberg, D.L. Wilcox, J.W. Coburn, and H.F. Winters J. Appl. Phys. 46 1975 4581
9. M.P. Seah 2nd ed. Practical Surface Analysis vol. 1 1990 Wiley Chapter 5
10. S. Hofmann 2nd ed. Practical Surface Analysis vol. 1 1990 Wiley Chapter 4
11. S. Tanuma, C. Powell, and D.R. Penn Surf. Interf. Anal. 17 1991 927