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Volumn 520, Issue 1-3, 2004, Pages 439-442
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Fabrication process responsible for fundamentally improving Silicon X-ray microcalorimeter arrays
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Author keywords
Array; Astro E2; Fabrication; Microcalorimeter; Pixel; XRS
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Indexed keywords
ANNEALING;
CALORIMETERS;
DIFFUSION;
ETCHING;
MICROMACHINING;
PHOTORESISTS;
SATELLITES;
SILICON ON INSULATOR TECHNOLOGY;
THERMISTORS;
THERMOMETERS;
X RAY SPECTROMETERS;
ASTRO-E2;
MICROCALORIMETER;
PIXEL;
NUCLEAR INSTRUMENTATION;
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EID: 12144286778
PISSN: 01689002
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nima.2003.11.358 Document Type: Conference Paper |
Times cited : (14)
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References (2)
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