Fabrication process responsible for fundamentally improving Silicon X-ray microcalorimeter arrays

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 520, Issue 1-3, 2004, Pages 439-442

  Brekosky, R P ^a,b   Allen, C A ^b   Galeazzi, M ^c   Gygax, J D ^a,b   Isenburg, H ^b   Kelley, R L ^b   McCammon, D ^d   McClanahan, R A ^b   Porter, F S ^b   Stahle, C K ^b   Szymkowiak, A E ^e  

^a NORTHROP GRUMMAN CORPORATION   (United States)

^b NASA GODDARD SPACE FLIGHT CENTER   (United States)

^c UNIVERSITY OF MIAMI   (United States)

^d University of Wisconsin ^*  (United States)

^e Yale University   (United States)

Author keywords

Array; Astro E2; Fabrication; Microcalorimeter; Pixel; XRS

Indexed keywords

ANNEALING; CALORIMETERS; DIFFUSION; ETCHING; MICROMACHINING; PHOTORESISTS; SATELLITES; SILICON ON INSULATOR TECHNOLOGY; THERMISTORS; THERMOMETERS; X RAY SPECTROMETERS;

ASTRO-E2; MICROCALORIMETER; PIXEL;

NUCLEAR INSTRUMENTATION;

EID: 12144286778     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2003.11.358     Document Type: Conference Paper

References (2)

1. Mott D.B., Dutta S.B., McClanahan R.A., Brekosky R.P., Stahle C.M., Kelley R.L., Stahle C.K., Szymkowiak A.E. LTD. 7:1997;C7.
2. C.K. Stahle, et al., Nucl. Instr. and Meth. A (2004), these proceedings.