Ultrashort pulse lasers - New aspects of materials interaction

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5448, Issue PART 1, 2004, Pages 213-224

  Kautek, W ^a   Rudolph, P ^a   Daminelli, G ^a   Hertwig, A ^a   Martin, S ^a   Bonse, J ^a   Kruger J ^a  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

Femtosecond pulses; Periodic nanostructures; Ripples; Surface energy; Water solid interface

Indexed keywords

COMPOSITION; DETECTORS; INTERFACES (MATERIALS); INTERFACIAL ENERGY; LASER PULSES; MOLECULAR DYNAMICS; PYROELECTRICITY;

FEMTOSECOND PULSES; PERIODIC NANOSTRUCTURES; RIPPLES; WATER-SOLID INTERFACE;

LASERS;

EID: 12144251784     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.548244     Document Type: Conference Paper

References (38)

1. W. Kautek and J. Krüger, "Femtosecond Pulse Laser Ablation of Metallic, Semiconducting, Ceramic and Biological Materials", SPIE Proceedings Vol. 2207, p. 600, 1994.
2. W. Kautek, S. Mitterer, J. Krüger, W. Husinsky, and G. Grabner, "Femtosecond Pulse Laser Ablation of Human Corneas", Appl. Phys. A 58, p. 513, 1994.
3. J. Krüger and W. Kautek, "The Femtosecond Pulse Laser: a new Tool for Micromachining", Laser Physics 9, p. 30, 1999.
4. J. Krüger and W. Kautek, "Ultrashort Pulse Laser Interaction with Dielectrics and Polymers", Advances in Polymer Science, Vol. 168, Springer Verlag, Heidelberg, p. 247, 2004.
5. W. Kautek, J. Krüger, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, "Laser Ablation of Dielectrics with Pulse Durations between 20 fs and 3 ps", Appl. Phys. Lett. 69, p. 3146, 1996.
6. M. Lenzner, J. Krüger, S. Sartania, Z. Cheng, C. Spielmann, G. Mourou, W. Kautek, and F. Krausz, "Femtosecond Optical Breakdown in Dielectrics", Phys. Rev. Lett. 80, p. 4076, 1998.
7. M. Lenzner, F. Krausz, J. Krüger and W. Kautek, "Photoablation with sub-10 fs laser pulses", Appl. Surf. Sci. 154-155, p. 11, 2000.
8. J. Bonse, M. Geuß, S. Baudach, H. Sturm, and W. Kautek, "The precision of the femtosecond Pulse Laser Ablation of TIN Films on Silicon", Appl. Phys. A 69, p. 399, 1999.
9. J. Bonse, P. Rudolph, J. Krüger, S. Baudach and W. Kautek, "Femtosecond pulse laser processing of TiN on silicon", Appl. Surf. Sci. 154-155, p. 659, 2000.
10. J. Bonse, S. Baudach, J. Krüger, W. Kautek, M. Lenzner, "Femtosecond laser ablation of silicon-modification thresholds and morphology", Appl. Phys. A 74, p. 19, 2002.
11. H.O. Jeschke, M.E. Garcia, M. Lenzner, J. Bonse, J. Krüger, W. Kautek, "Laser ablation thresholds of silicon for different pulse durations: theory and experiment", Appl. Surf. Sci. 197-198, p. 839, 2002.
12. J. Bonse, K. -W. Brzezinka and A. J. Meixner, "Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy", Appl. Surf. Sci. 221, p. 215, 2004.
13. J. Bonse, J. M. Wrobel, J. Krüger, and W. Kautek, "Ultrashort pulse laser ablation of Indium Phosphide in air", Appl. Phys. A 12, p. 89, 2001.
14. J. Bonse, J. M. Wrobel, K. -W. Brzezinka, N. Esser and W. Kautek, "Femtosecond laser irradiation of indium phosphide in air: Raman spectroscopic and atomic force microscopic investigations", Appl. Surf. Sci. 202, p. 272, 2002.
15. J. Bonse, H. Sturm, D. Schmidt, W. Kautek, "Chemical, morphological and accumulation phenomena in ultrashortpulse laser ablation of TiN in air", Appl. Phys. A 71, p.657, 2000.
16. J. Krüger, P. Meja, M. Autric, W. Kautek, Femtosecond Pulse Laser Ablation of Anodic Oxide coatings on Aluminium Alloys with on-line acoustic observation", Appl. Surf. Sci. 186, p. 374, 2002.
17. G. Daminelli, P. Meja, A. Cortona, J. Krüger, M. Autric, W. Kautek, "Femtosecond and nanosecond laser removal of anodic oxide layers from aluminium", SPIE Proceedings Vol. 4760, p. 239, 2002.
18. 2 composite ceramic compound", Appl. Surf. Sci. 208-209, p. 285, 2003.
19. P. Rudolph, W. Kautek, "Composition Influence of Non-oxidic ceramics on Self-assembled nanostructures due to fs-Laser irradiation", Thin Solid Films 453-454, p. 537, 2004.
20. J. Krüger, M. Lenzner, S. Martin, M. Lenner, C. Spielmann, A. Fiedler and W. Kautek, "Single- and multi-pulse femtosecond laser ablation of optical filter materials", Appl. Surf. Sci. 208-209, p. 233, 2003.
21. S. Martin, J. Krüger, A. Hertwig, A. Fiedler, W. Kautek, "Femtosecond Laser Interaction with Protection Materials" Appl. Surf. Sci. 208-209, p. 333, 2003.
22. S. Martin, A. Hertwig, M. Lenzner, J. Krüger, and W. Kautek, Appl. Phys. A 77 (2003) 883. "Spot size dependence of the ablation threshold in dielectrics for femtosecond laser pulses".
23. A. Hertwig, S. Martin, J. Krüger and W. Kautek, "Interaction area dependence of the ablation threshold of ion- doped glass", Thin Solid Films 453-454, p. 527, 2004.
24. A. Hertwig, S. Martin, J. Krüger and W. Kautek, "Colour centre generation, induced transmission and damage of optical dielectrics with femtosecond laser pulses", Appl. Phys. A, 2004, submitted.
25. A. Hertwig, S. Martin, J. Krüger, C. Spielmann, M. Lenner, W. Kautek, "Safety Aspects in Femtosecond Technology: Primary Hazards and Reliability of Protective Materials", Femtosecond Technology for Technical and Medical Applications, (eds.) Dausinger, Lichtner, Lubatschowski, Topics in Applied Physics, Springer Verlag, Heidelberg, 2004, in press.
26. R. Oltra, E. Arenholz, P. Leiderer, W. Kautek, C. Fotakis, M. Autric, C. Afonso, P. Wazen, "Modelling and Diagnostic of Pulsed Laser-Solid Interactions. Applications to Laser Cleaning", SPIE Proceedings Vol. 3885, p. 499, 2000.
27. A. Cortona and W. Kautek, "Microcorrosion and Shock-Affected Zone Investigation at Anodic Films on Aluminium Alloys by Pulse Laser Depassivation", Phys. Chem. Chem. Phys. 3, p. 5283, 2001.
28. W. Kautek and G. Daminelli, "Electrochemical reactivity of laser machined microcavities on anodised aluminium alloys", Electrochim. Acta 48, p. 3249, 2003.
29. G. Daminelli, J. Krüger, W. Kautek, "Femtosecond laser interaction with silicon under water confinement", Appl. Phys. A, 2004, in print.
30. J. Krüger and W. Kautek,"Femtosecond-Pulse Visible Laser Processing of Transparent Materials", Appl. Surf. Sci. 96-98, p. 430, 1996.
31. F. Costache, M. Henyk, and J. Reif, "Modification of dielectric surfaces with ultra-short laser pulses", Appl. Surf. Sci. 186, p. 352, 2002.
32. J. Reif, F. Costache, M. Henyk, and S.V. Pandelov, "Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics", Appl. Surf. Sci. 197-198, p. 891, 2002.
33. F. Costache, M. Henyk, and J. Reif, "Surface patterning on insulators upon femtosecond laser ablation", Appl. Surf. Sci. 208, p. 486, 2003.
34. F. Costache, S. Kouteva-Arguirova, and J. Reif, "Self-assembled surface patterning and structural modification upon femtosecond laser processing of crystalline silicon", Sol. St. Phen. 95-96, p. 635, 2004.
35. D. Bäuerle, Laser Processing and Chemistry, p. 571, Springer Verlag, Berlin, Heidelberg, New York, 2000.
36. A.W. Adamson, Physical Chemistry of Surfaces, John Wiley & Sons, New York, 1976.
37. R. Pampuch, Constitution and Properties of Ceramic Materials, Elsevier, Amsterdam, Oxford, New York, Tokyo, 1991.
38. Online Materials Dataweb, www.MatWeb.com