Artificial dielectric optical structures: A challenge for nanofabrication

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3903-3905

  Giaconia, C ^a,b   Torrini, R ^a,b   Murad, S K ^a   Wilkinson, C D W ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

^b UNIVERSITY OF PALERMO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11744356171     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590432     Document Type: Article

References (16)

1. C. Arnone, C. Giaconia, and G. Lullo, Diffractive Optic and Optical Microsystem, edited by S. Martellucci et al. (Plenum, New York, 1997), pp. 119-131.
2. D. H. Raguin and G. M. Morris, Laser Focus World 33, 113 (1997).
3. J. R. Wendt, G. A. Vawter, R. E. Smith, and M. E. Warren, J. Vac. Sci. Technol. B 13, 2705 (1995).
4. J. R. Wendt, G. A. Vawter, R. E. Smith, and M. E. Warren, J. Vac. Sci. Technol. B 15, 2946 (1997).
5. F. T. Chen and H. G. Craighead. Opt. Lett. 20, 177 (1996).
6. S. Babin and A. Tomnikov, Microelectron. Eng. 27, 167 (1995).
7. F. Xu, R. C. Tyan, P. C. Sun, Y. Fainman, C. C. Cheng, and A. Scherer, Opt. Lett. 20, 2457 (1995).
8. W. Parkes, S. Thoms, and C. D. W. Wilkinson, Microelectron. Eng. 23, 465 (1994).
9. K. Knop, J. Opt. Soc. Am. 68, 1206 (1978).
10. T. K. Gaylord and G. Moharam, Proc. IEEE 73, 894 (1985).
11. W. B. Veldkamp, G. J. Swanson, S. A. Gaither, C. L. Chen, and T. R. Osborne, MIT Report ODT 20, 1989.
12. T. Delort and D. Maystre, J. Opt. Soc. Am. 10, 2592 (1993).
13. M. K. Moaveni, Proc. IEE 126, 35 (1979).
14. S. M. Rytov, Sov. Phys. JETP 2, 466 (1956).
15. C. Giaconia, R. Torrini, S. Murad, and C. D. W. Wilkinson, Digest of Diffractive Optics and MicroOptics, OSA Summer Topical Meetings, Hawaii, 1998 (to be published).
16. S. K. Murad, C. D. Wilkinson, and S. P. Beaumont, Microelectron. Eng. 23, 357 (1994).