Advancing aluminium: Interconnect technology

Semiconductor International

Volumn 21, Issue 13, 1998, Pages 83-88

  Peters, Laura ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11744338223     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (1)

1. P. Singer, "Dual-Damascene Aluminum Process Developed," Semiconductor International, Aug. 1998, p.46.