Self-aligned Si gate field emitter arrays using the transfer mold technique

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 2, 1998, Pages 770-772

  Sakai, Tadashi ^a   Ono, Tomio ^a   Nakamoto, Masayuki ^a,b   Sakuma, Naoshi ^a  

^a TOSHIBA CORPORATION   (Japan)

^b Mat and Devices Res Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11744289529     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589901     Document Type: Article

References (7)

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