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Volumn 14, Issue 4, 1998, Pages 273-280
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A time series approach for compensating for errors in complex gauge systems
a,c,d,e a,c,f b,d,e,g,h |
Author keywords
Autocorrelated errors; Gauge bias; Gauge error; Semiconductor testing; Time series models
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Indexed keywords
CALIBRATION;
CORRELATION METHODS;
ERROR COMPENSATION;
MATHEMATICAL MODELS;
MEASUREMENT ERRORS;
SEMICONDUCTOR DEVICE MANUFACTURE;
TIME SERIES ANALYSIS;
GAUGE ERRORS;
SEMICONDUCTOR DEVICE TESTING;
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EID: 11744288760
PISSN: 07488017
EISSN: None
Source Type: Journal
DOI: 10.1002/(SICI)1099-1638(199807/08)14:4<273::AID-QRE190>3.0.CO;2-Q Document Type: Article |
Times cited : (2)
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References (8)
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