Transient optical transmission measurement in excimer-laser irradiation of amorphous silioon films

Journal of Heat Transfer

Volumn 115, Issue 1, 1993, Pages 178-183

  Park, H K ^a   Xu, X ^a   Grigoropoulos, C P ^a   Do, N ^b,c   Klees, L ^b,d   Leung, P T ^b,e   Tam, A C ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^e PORTLAND STATE UNIVERSITY   (United States)

Author keywords

Laser processing; Materials and manufacturing processes; Radiation interactions

Indexed keywords

EID: 11744280133     PISSN: 00221481     EISSN: 15288943     Source Type: Journal    
DOI: 10.1115/1.2910645     Document Type: Article

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