Synthesis of BaxSr1-xTiO3 thin films from complex alkoxide solutions

Journal of the Ceramic Society of Japan

Volumn 106, Issue 11, 1998, Pages 1151-1154

  Satoh, Tomoaki ^a   Ogawa, Makoto ^a   Konno, Mikio ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

BST; Complex alkoxide; Condensation; Dielectric constant; Hydrolysis; Spin coating; Thin film

Indexed keywords

ALCOHOLS; BARIUM TITANATE; CATALYSTS; CONDENSATION REACTIONS; CRYSTALLIZATION; HEAT TREATMENT; HYDROLYSIS; NITRIC ACID; PERMITTIVITY; SOLS; SYNTHESIS (CHEMICAL); THIN FILMS;

BARIUM STRONTIUM TITANATE; METHOXYETHANOL; TITANIUM TETRAETHOXIDE;

DIELECTRIC FILMS;

EID: 11644326701     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.106.1151     Document Type: Article

References (21)

1. X. Chen, A. I. Kingon, H. N. Al-Shareef, K. R. Bellur, K. Gifford and O. Auciello, Integr. Ferroelectr., 7, 291-306 (1995).
2. D. Ivanov, M. Caron, L. Quellet, S. Blain, N. Henducks and J. Currie, J. Appl Phys., 77, 2666-71 (1995).
3. J. Carrano, C. Sudhama, V. Chikarmane, J. Lee, A. Tasch, W. Shepherd and N. Abt, IEEE Trans. Ultrason., Ferroelectr., Freq. Control, 38, 690-702 (1991).
4. T. Horikawa, N. Mikami, T. Makita, J. Tanimura, M. Kataoka, K. Sato and M. Nunoshiba, Jpn. J. Appl. Phys., 32, 4126-30 (1993).
5. S.-G. Yoon, J. Lee and A. Safari, Integr. Ferroelectr., 7, 329-39 (1995).
6. D. Roy and S. B. Krupanidhi, Appl. Phys. Lett., 62, 1056-58 (1993).
7. W.-J. Lee and H.-G. Kim, Integr. Ferroekctr., 7, 207-14 (1995).
8. Y. Miyasaka and S. Matsubara, Proceedings of IEEE International Symposium on the Applications of Ferroelectrics, IEEE, New York, USA (1990) pp. 121-24.
9. K. Koyama, T. Sakuma, S. Yamauchi, H. Watanabe, H. Aoki, S. Ohya, Y. Miyasaka and T. Kikkawa, IEEE International Electron Devices Meeting Technical Digest (1991) pp. 823-26.
10. P. Bhattacharya, T. Komeda, D. Park and Y. Nishioka, Jpn. J. Appl. Phys., 32, 4103-06 (1993).
11. P. Kirkin, S. Bilodeau and P. Van Buskik, Integr. Ferroelectr., 7, 307-18 (1995).
12. R. Tsu, S. Summerfelt and B. Gnade, 1994 Materials Research Society Fall Meeting, Materials Research Society, Pittsburg, PA (1994) pp. 275-80.
13. C. Chen and S. B. Desu, 1994 Materials Research Society Fall Meeting, Materials Research Society, Pittsburg, PA (1994) pp. 99-104.
14. R. Moazzami, C. Hu and W. H. Shepherd, IEEE Trans. Electron Devices, 39, 2044-49 (1992).
15. L. Swartz and V. E. Wood, Condens. Matter News, 1, 4-13 (1992).
16. G. Yi and M. Sayer, Am. Ceram. Soc. Bull, 70, 1173-79 (1991).
17. D. M. Tahan, A. Safari and L. C. Klein, J. Am. Ceram. Soc., 79, 1593-98 (1996).
18. S.-I. Jang, B.-C. Choi and H. M. Jang, J. Mater. Res., 12, 1327-34 (1997).
19. T. Satoh, Y. Yamamoto and M. Konno, Kagaku Kogaku Ronbunshu, 23, 998-1000 (1997).
20. H. M. Jang and M. K. Cho, J. Am. Ceram. Soc., 79, 1435-40 (1996).