Laser alloying for ohmic contacts on SiC at room temperature

Materials Science Forum

Volumn 264-268, Issue PART 2, 1998, Pages 783-786

  Ota, Y ^a   Ikeda, Y ^a   Kitabatake, M ^a  

^a PANASONIC CORPORATION   (Japan)

Author keywords

Alloy; Contact Resistivity; Diode; Laser; Ohmic; Schottky

Indexed keywords

ALLOYING; ELECTRIC CONDUCTIVITY OF SOLIDS; LASER ABLATION; METAL INSULATOR BOUNDARIES; SCHOTTKY BARRIER DIODES; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; SOLID STATE LASERS; TITANIUM;

LASER ALLOYING;

OHMIC CONTACTS;

EID: 11644305751     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.264-268.783     Document Type: Article

References (6)

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