Bio-nano-structures built on e-beam-assisted functionalized polymer surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3241, Issue , 1997, Pages 222-227

  Nicolau, Dan V ^a   Taguchi, Takahisa ^a   Dusa, Mircea ^b   Yoshikawa, Susumu ^a  

^a OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

^b NATIONAL SEMICONDUCTOR CORPORATION   (United States)

Author keywords

Bio microlithography; Biodevices; e beam lithography; Proteins

Indexed keywords

AMINES; BIOASSAY; BIOCHIPS; CARBOXYLIC ACIDS; CROSSLINKING; FLOW INTERACTIONS; FUNCTIONAL POLYMERS; HYDROPHOBICITY; IMAGE ENHANCEMENT; INTEGRATED CONTROL; INTELLIGENT MATERIALS; MICROARRAYS; ORGANIC ACIDS; PROTEINS; TURBULENT FLOW;

BIO-MICROLITHOGRAPHY; BIOACTIVE MOLECULES; BIODEVICES; CARBODIIMIDE; COMBINATORIAL CHEMISTRIES; E-BEAM LITHOGRAPHY; FUNCTIONALIZED POLYMERS; HIGH RESOLUTIONS; HYDROPHOBIC INTERACTIONS; NEGATIVE TONES; NM RESOLUTIONS; POSITIVE TONES; PROTEIN ATTACHMENTS; REPULSIVE INTERACTIONS; SENSITIVE SYSTEMS; SHARP CONTRASTS;

ELECTRON BEAM LITHOGRAPHY;

EID: 11644271607     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.293500     Document Type: Conference Paper

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