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Volumn 23, Issue 12, 1998, Pages 30-34

Wafer-bonding and thinning technologies

Author keywords

[No Author keywords available]

Indexed keywords


EID: 11644265301     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/S0883769400029808     Document Type: Article
Times cited : (22)

References (51)
  • 9
    • 3843084388 scopus 로고
    • Philips J. Res. 49 (1995) p. 1.
    • (1995) Philips J. Res. , vol.49 , pp. 1
  • 26
    • 0002360239 scopus 로고
    • For example, see Solid-State Technol. (1994) p. 155 or back cover page of Euro. Semicond. (1994).
    • (1994) Solid-State Technol. , pp. 155
  • 27
    • 11644302763 scopus 로고
    • For example, see Solid-State Technol. (1994) p. 155 or back cover page of Euro. Semicond. (1994).
    • (1994) Euro. Semicond.
  • 28
    • 0027813025 scopus 로고
    • Institute of Electrical and Electronics Engineers
    • A.M. Ledger and P.J. Clapis, in Proc. IEEE Int. SOI Conf. (Institute of Electrical and Electronics Engineers, 1993) p. 64.
    • (1993) Proc. IEEE Int. SOI Conf. , pp. 64
    • Ledger, A.M.1    Clapis, P.J.2
  • 51
    • 11544283317 scopus 로고    scopus 로고
    • Institute of Electrical and Electronics Engineers
    • F.A. Kish, in Proc. IEEE LEOS '96 Conf. (Institute of Electrical and Electronics Engineers, 1996) p. 292.
    • (1996) Proc. IEEE LEOS '96 Conf. , pp. 292
    • Kish, F.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.