Pure aluminum process solution for advanced LCDs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3014, Issue , 1997, Pages 10-17

  Pethe, Rajiv G ^a   Bedekar, Milind ^a   Demaray, Richard E ^a   Deshpandey, Chandra V ^a   Shao, Henry ^a  

^a Applied Komatsu Technology   (United States)

Author keywords

Aluminum; Grain orientation; Hillock formation; Interconnection; Liquid crystal display

Indexed keywords

ALUMINA; ALUMINUM; LIGHT METALS; LIGHT SOURCES; LIQUID CRYSTAL DISPLAYS; LIQUID CRYSTALS; SPURIOUS SIGNAL NOISE; SUBSTRATES;

BASE PRESSURE; DEPOSITION PROCESSING; GLASS SUBSTRATES; GRAIN ORIENTATION; HILLOCK FORMATION; INTERCONNECTION; LARGE SIZES; LIQUID CRYSTAL DISPLAY; LOW RESISTIVITY; PROCESS PARAMETERS; PURE ALUMINUM; SUBSTRATE ROUGHNESS; SUBSTRATE TEMPERATURE (ST); UNDERLAYER THICKNESS;

CRYSTAL ORIENTATION;

EID: 11644250396     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.270287     Document Type: Conference Paper

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