Real time optical method of stress measurements in thin films

Materials Science Forum

Volumn 287-288, Issue , 1998, Pages 141-150

  Moulard, G ^a   Contoux, G ^a   Motyl, G ^a   Courbon, M ^a  

^a UNIVERSITÉ JEAN MONNET   (France)

Author keywords

Cantilever; Image Processing; Intrinsic Stress; Stress

Indexed keywords

EID: 11544346779     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.287-288.141     Document Type: Article

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