A methodology to reduce error sources in the determination of thin film chemical composition by EDAX

Thin Solid Films

Volumn 450, Issue 1, 2004, Pages 207-210

  Ares, J R ^a,b   Pascual, A ^a   Ferrer, I J ^a   Sanchez C ^a  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^b ISCA CNRS   (France)

Author keywords

Chalcogenides; EDAX; EDS; Pyrite; Sulphides

Indexed keywords

CARBON; COMPOSITION; CORROSION; CRYSTAL DEFECTS; DEPOSITION; ELECTRON BEAMS; ENERGY DISPERSIVE SPECTROSCOPY; ERROR ANALYSIS; MONTE CARLO METHODS; OXIDATION; PYRITES; STOICHIOMETRY; THICKNESS MEASUREMENT; X RAY ANALYSIS;

CHALCOGENIDES; SULPHIDES;

THIN FILMS;

EID: 1142291759     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.10.073     Document Type: Conference Paper

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