Ion sputtering at grazing incidence for SIMS-analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 228, Issue 1-4 SPEC. ISS., 2005, Pages 373-377

  Ullrich, M ^a   Burenkov, A ^a   Ryssel, H ^a  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

Author keywords

Angular distribution; Depth resolution; Ion sputtering; Monte Carlo; SIMS

Indexed keywords

ANGULAR DISTRIBUTIONS; DEPTH RESOLUTION; ION SPUTTERING; MONTE-CARLO SIMULATIONS;

ALGORITHMS; CESIUM; COMPUTER SIMULATION; DEUTERIUM; ION BEAMS; ION BOMBARDMENT; MONTE CARLO METHODS; OXYGEN; SECONDARY ION MASS SPECTROMETRY;

SPUTTERING;

EID: 11344272370     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.10.073     Document Type: Conference Paper

References (5)

1. R. Becerra-Acevedo, J. Bohdansky, W. Eckstein, and J. Roth Nucl. Instr. and Meth. B 2 1984 631
2. J. Roth, J. Bohdansky, and W. Eckstein Nucl. Instr. and Meth. 218 1983 751
3. J.P. Biersack, and W. Eckstein Appl. Phys. A 34 1984 73
4. M. Saggio, C. Montandon, A. Burenkov, L. Frey, and P. Pichler Radiat. Eff. Def. Solids 141 1997 37
5. C. Montandon, A. Bourenkov, L. Frey, P. Pichler, and J.P. Biersack Radiat. Eff. Def. Solids 145 1998 213