Fabrication of photonic crystal structures by Focused Ion Beam etching

Proceedings of 2004 6th International Conference on Transparent Optical Networks

Volumn 2, Issue , 2004, Pages 135-138

  Hill, M ^a   Cryan, M ^a   Lim, N ^a   Varrazza, R ^a   Heard, P ^a   Yu, S ^a   Rorison, J ^a  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; ETCHING; FABRICATION; FOCUSING; INDUCTIVELY COUPLED PLASMA; ION BEAMS; OPTIMIZATION; PHOTONS; SILICA;

CHEMICALLY ASSISTED ION BEAM ETCHING (CAIBE); FOCUSED ION BEAMS (FIB); PHOTONIC CRYSTALS; REACTIVE ION ETCHING (RIE);

CRYSTAL STRUCTURE;

EID: 11244296672     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. T.F. Krauss, Planar photonic crystal waveguide devices for integrated optics, Phys Stat Sol. 197 (3): 688-702 JUN 2003.
2. R. Houdre et al, Optical study of bi-dimensional photonic crystals structures fabricated by inductively coupled plasma etching in InP-based waveguides, Photonic and Electromagnetic Crystal Structures, PECS-IV, UCLA, Los Angeles, USA, October 2002.
3. M.J. Cryan, M. Hill, R. Varrazza, M. Moro Ronda, I.J. Craddock, S.Y u, C.J. Railton and J. Rorison, Modelling and Measurement of 2D Photonic Crystals with Tapered Hole Profiles, ICTON 2003, Poland 2003.
4. M. Hill et al, Focused Ion Beam Fabrication of Photonic Crystal Structures, CLEO Europe 2003.
5. Andrew L. Reynolds, Optoelectronics Research Group of the Department of Electronics & Electrical Engineering, the University of Glasgow and J.B. Pendry, P.M. Bell, A.J. Ward and L. Martin Moreno, Imperial College, London.