Process technology to integrate polycrystalline uncooled PbSe infrared detectors on interference filters

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5251, Issue , 2004, Pages 97-102

  Rodrigo, M T ^a   Diezhandino, J ^a   Vergara, G ^a   Perez G ^a   Torquemada, M C ^a   Sanchez F J ^a   Villamayor, V ^a   Almazan R ^a   Verdu M ^a   Geneva I ^a   Rodriguez P ^a   Gomez L J ^a   Catalan I ^a   Plaza, J ^a   Montojo, M T ^a  

^a Ctro Invest y Desarrollo la Armada   (Spain)

Author keywords

Focal plane arrays; Infrared; Lead selenide; Uncooled

Indexed keywords

DEPOSITION; DRY ETCHING; GERMANIUM; HEAT TREATMENT; INFRARED DETECTORS; MULTILAYERS; PHOTOLITHOGRAPHY; PHOTOSENSITIVITY; POLYCRYSTALLINE MATERIALS; SAPPHIRE; SILICON;

FOCAL PLANE ARRAYS; LEAD SELENIDE; UNCOOLED;

LEAD COMPOUNDS;

EID: 11144357672     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.512601     Document Type: Conference Paper

References (4)

1. N. Gluck, R.B. Bailey, R de la Rosa, R.L. Hall. "Two-color imaging using patterned optical filters bonded to focal plane array detctors", Optical Interference Coatings, Technical Digest Series, 17, 385-389, 1995.
2. A. Muñoz, J. Meléndez, M. C. Torquemada, M. T. Rodrigo, J. Cebrián, A. J. de Castro, J. Meneses, M. Ugarte, F. Lopez, G. Vergara, J. L. Hernández, J. M. Martin, L. Adell, M. T. Montojo. "PbSe photodetector arrays for IR sensors", Thin Solid Films, 317, 425-428, 1998.
3. M. C. Torquemada, M. T. Rodrigo, G. Vergara, F. J. Sánchez, R. Almazán, M. Verdú, P. Rodríguez, V. Villamayor, L. J. Gómez and M. T. Montojo. "Role of halogens in the mechanism of sensitization of uncooled PbSe infrared photodetectors.", Journal of Applied Physics, 93 (3), 1778-1784, 2003.
4. M.T. Rodrigo, F.J. Sánchez, M.C. Torquemada, V. Villamayor, G. Vergara, M. Verdú, L.J. Gómez, J. Diezhandino, R. Almazán, P. Rodriguez, J. Plaza, I. Catalan, M.T. Montojo. "Polycrystalline lead selenide x-y addresed uncooled focal plane arrays", Infrared Physics & Technology, 44, 281-287, 2003.