Tribology and applications of DLC and cBN films

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 66, Issue 4, 2000, Pages 539-543

  Miyake, Shojiro ^a  

^a NONE

Author keywords

Atomic force microscope; Cubic boron nitride; Diamond like carbon; Multilayered film; Nanoprocessing; Protective film; Super hard film; Tribology

Indexed keywords

EID: 11144231177     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.66.539     Document Type: Article

References (19)

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