SCOPUS 정보 검색 플랫폼

Volumn 20, Issue 8, 2004, Pages 777-786

Generalized linear model-based control charts for discrete semiconductor process data

Author keywords

Generalized linear model; Model based control chart; Overdispersion

Indexed keywords

DATA PROCESSING; FUNCTIONS; MULTIVARIABLE CONTROL SYSTEMS; POISSON DISTRIBUTION; RANDOM PROCESSES; REGRESSION ANALYSIS;

DATA SETS; GENERALIZED LINEAR MODEL; MODEL-BASED CONTROL CHART; OVERDISPERSION;

SEMICONDUCTOR MATERIALS;

EID: 11044226732 PISSN: 07488017 EISSN: None Source Type: Journal
DOI: 10.1002/qre.603 Document Type: Article

Times cited : (42)

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