Recent progress on UV lamps for industries

Conference Record - IAS Annual Meeting (IEEE Industry Applications Society)

Volumn 2, Issue , 2004, Pages 1008-1015

  Morimoto, Yukihiro ^a   Sumitomo, Taku ^a   Yoshioka, Masaki ^a   Takemura, Tetsu ^a  

^a USHIO INC   (Japan)

Author keywords

Excimer lamp; Flash lamp; Super high pressure mercury lamp; Ultraviolet ray

Indexed keywords

ANNEALING; DAYLIGHTING; DISCHARGE LAMPS; ELECTRIC NETWORK ANALYSIS; PHOTOLITHOGRAPHY; RADIATION EFFECTS; SILICON WAFERS;

EXCIMER LAMP; FLASH LAMP; SUPER-HIGH PRESSURE MERCURY LAMP; ULTRAVIOLET-RAY;

ULTRAVIOLET LAMPS;

EID: 10944251795     PISSN: 01972618     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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