Planar aluminum interconnection formed by electrochemical anodizing technique

Microelectronic Engineering

Volumn 37-38, Issue , 1997, Pages 329-334

  Surganov, V ^a   Mozalev, A ^a  

^a BELARUSIAN STATE UNIVERSITY OF INFORMATICS AND RADIOELECTRONICS   (Belarus)

Author keywords

Aluminium; Anodic alumina; Electrochemical anodizing; Multilevel interconnection; Planarization; ULSI

Indexed keywords

ALUMINA; ALUMINUM; ANODIC OXIDATION; DIELECTRIC FILMS; INTEGRATED CIRCUIT MANUFACTURE; ULSI CIRCUITS;

ELECTROCHEMICAL ANODIZING; PLANARIZATION;

MICROELECTRONIC PROCESSING;

EID: 10944248891     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(97)00129-9     Document Type: Article

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