Combined electron- and ion-beam Imprinter and its applications

Applied Physics Letters

Volumn 85, Issue 20, 2004, Pages 4618-4620

  Ji, Q ^a,b   Ji, L ^c   Chen, Y ^c   Leung, K N ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b HARVARD UNIVERSITY   (United States)

^c Etcheverry Hall MCI 730   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSED ION-BEAMS (FIB); IMAGE INSULATING MATERIALS; LIQUID-METAL ION SOURCES (LMIS); PLASMA CHAMBERS;

ANTENNAS; MAGNETIC FILMS; MICROMACHINING; PARTICLE ACCELERATORS; SILICON NITRIDE; STAINLESS STEEL;

ION BEAMS;

EID: 10944241861     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1812367     Document Type: Article

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