Analysis of polarized light reflection from surface defects on steel sheets and its application to a high-speed inspection technique

Tetsu-To-Hagane/Journal of the Iron and Steel Institute of Japan

Volumn 90, Issue 11, 2004, Pages 870-876

  Kazama, Akira ^a   Sugiura, Hiroyuki ^a   Oshige, Takahiko ^b   Inomata, Masaichi ^c   Uesugi, Mitsuaki ^c   Taguchi, Noboru ^b  

^a JFE R and D Corporation   (Japan)

^b JFE STEEL CORPORATION   (Japan)

^c KOKAN KEISOKU Corp   (Japan)

Author keywords

Ellipsometry; Excessive detection; Polarized light; Shallow defect; Surface inspection

Indexed keywords

DEFECTS; DIELECTRIC MATERIALS; ELLIPSOMETRY; INSPECTION; LIGHT POLARIZATION; SURFACE PHENOMENA;

AZIMUTH ANGLES; EXCESSIVE DETECTION; SHALLOW EFFECT; SURFACE INSPECTION;

STEEL SHEET;

EID: 10944228451     PISSN: 00211575     EISSN: None     Source Type: Journal    
DOI: 10.2355/tetsutohagane1955.90.11_870     Document Type: Article

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