Generation of nitrogen beams with very high N+/N 2+ ratio using hollow cathode discharge

Vacuum

Volumn 77, Issue 2, 2005, Pages 157-162

  Shen, Hong ^a   Qin, Zongyi ^a   Zhang, Yu ^a   Mi, Lan ^a   Xu, Peng ^a   Ying, Xuan Tong ^a   Wang, Pei Nan ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

Hollow cathode discharge; Nitrogen beam; TOFMS

Indexed keywords

ARGON; CATHODES; ELECTRIC DISCHARGES; GRAPH THEORY; MASS SPECTROMETRY; SEMICONDUCTOR DEVICES; ULTRAVIOLET RADIATION;

HOLLOW CATHODE DISCHARGES; MASS SPECTROSCOPY; NITROGEN BEAMS; TOFMS;

NITROGEN;

EID: 10844252160     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.08.017     Document Type: Article

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