Optimal design and development of electromagnetic linear actuator for mass flow controller

KSME International Journal

Volumn 17, Issue 1, 2003, Pages 40-47

  Chung, Myung Jin ^a   Gweon, Dae Gab ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Control Valve; Electromagnetic Linear Actuator; Mass Flow Controller; Optimal Design

Indexed keywords

CONTROL EQUIPMENT; ELECTRIC POTENTIAL; ELECTROMAGNETISM; FLOW CONTROL; GRAVITATIONAL EFFECTS; VALVES (MECHANICAL);

CONTROL VALVES; ELECTROMAGNETIC LINEAR ACTUATORS; MASS FLOW CONTROLLERS; OPTIMAL DESIGN;

ACTUATORS;

EID: 10844244036     PISSN: 12264865     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02984284     Document Type: Article

References (5)

1. Grace, A., 1990, Optimization Toolbox User's Guide., The Math Works Inc.
2. Hanselman, D. C., 1994, Brushless Permanent-Magnet Motor Design., McGraw-Hill Inc.
3. Hinkle, L. D. and Mariano, C. F., 1991, "Toward Understanding the Fundamental Mechanisms and Properties of the Thermal Mass Flow Controller, " J. of Vacuum Science Technology, A9 (3).
4. Holman, J. P., 1981, Heat Transfer., MaGraw-Hill Inc.
5. Krause, P. C., 1986, Analysis of Electric Machinery., MaGraw-Hill Book Company.