Synthesis and characterization of large area well-aligned carbon nanotubes by ECR-CVD without substrate bias

Vacuum

Volumn 77, Issue 2, 2005, Pages 139-144

  Wang, Zhi ^a,b   Ba, Dechun ^a   Liu, Fei ^c   Cao, Peijiang ^c   Yang, Tianzhong ^c   Gu, Yousong ^d   Gao, Hongjun ^c  

^a NORTHEASTERN UNIVERSITY   (China)

^b SHENYANG AEROSPACE UNIVERSITY   (China)

^c INSTITUTE OF PHYSICS   (China)

^d UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

Author keywords

Carbon nanotube; ECR CVD; Nanoparticle

Indexed keywords

CATALYSTS; CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; NANOSTRUCTURED MATERIALS; POROUS SILICON; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

CHAIN STRUCTURES; NANOPARTICLES; PRECURSOR GASES; SOURCE GASES;

CARBON NANOTUBES;

EID: 10844225212     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.08.012     Document Type: Article

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