Pyrolytic laser CVD of boron nitride and molybdenum

Chemical Vapor Deposition

Volumn 9, Issue 6, 2003, Pages 298-301

  Duty, Chad ^a   Johnson, Ryan ^a   Bondi, Scott ^a   Lackey, W Jack ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CHEMICAL VAPOR DEPOSITION; CORROSION PREVENTION; ELECTRIC CONDUCTIVITY; ELECTRONIC EQUIPMENT; MOLYBDENUM; PYROLYSIS; THERMAL CONDUCTIVITY;

ELECTRONIC DEVICES; MANUFACTURING PROCESSES; THERMAL SHOCK;

CUBIC BORON NITRIDE;

EID: 10644283944     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/cvde.200304159     Document Type: Article

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