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Materials Science and Engineering: B

Volumn 114-115, Issue SPEC. ISS., 2004, Pages 77-81

Evolution of end-of-range defects in Si after Xe implantation studied by grazing incidence diffuse X-ray scattering

(2) Capello, L a Metzger, T H a

a EUROPEAN SYNCHROTRON RADIATION FACILITY (France)

Author keywords

Crystal microstructure defects; Stacking faults; X ray scattering

Indexed keywords

CMOS INTEGRATED CIRCUITS; CRYSTAL MICROSTRUCTURE; RAPID THERMAL ANNEALING; SEMICONDUCTOR JUNCTIONS; SILICON; STACKING FAULTS; TRANSMISSION ELECTRON MICROSCOPY; X RAY SCATTERING; X RAYS;

BURGERS VECTOR; GRAZING INCIDENCE; THERMAL DIFFUSE SCATTERING (TDS); TRANSIENT ENHANCED DIFFUSION (TED);

ION IMPLANTATION;

EID: 10644263073 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/j.mseb.2004.07.074 Document Type: Conference Paper

Times cited : (4)

References (10)

1
- 85166168765
- E. Chason, S.T. Picraux, J.M. Poate, J.O. Borland, M.I. Current, T. Diaz de la Rubia, D.J. Eaglesham, O.W. Holland, M.E. Law, C.W. Magee, J.M. Mayer, J. Melngailis, A.F. Tasch, J. Appl. Phys. 6513 (1997) 81.
- (1997) J. Appl. Phys. , vol.6513 , pp. 81
- Chason, E.¹ Picraux, S.T.² Poate, J.M.³ Borland, J.O.⁴ Current, M.I.⁵ De La Rubia, T.D.⁶ Eaglesham, D.J.⁷ Holland, O.W.⁸ Law, M.E.⁹ Magee, C.W.¹⁰ Mayer, J.M.¹¹ Melngailis, J.¹² Tasch, A.F.¹³

2
- 85166114704
- A. Claverie, B. Colombeau, B. De Maudit, C. Bonafos, X. Hebras, G. Ben Assayag, F. Cristiano, Appl. Phys. A 1025 (2003) 76.
- (2003) Appl. Phys. A , vol.1025 , pp. 76
- Claverie, A.¹ Colombeau, B.² De Maudit, B.³ Bonafos, C.⁴ Hebras, X.⁵ Assayag, G.B.⁶ Cristiano, F.⁷

3
- 10644274839
- F. Cristiano, J. Grisolia, B. Colombeau, M. Omri, B. de Maudit, A. Claverie, L.F. Giles, N.E.B. Cowem, J. Appl. Phys. 8420 (2000) 87.
- (2000) J. Appl. Phys. , vol.8420 , pp. 87
- Cristiano, F.¹ Grisolia, J.² Colombeau, B.³ Omri, M.⁴ De Maudit, B.⁵ Claverie, A.⁶ Giles, L.F.⁷ Cowem, N.E.B.⁸

4
- 0003584874
- Springer, Berlin
- H. Dosch, Critical Phenomena at Surfaces and Interfaces-Evanescent X-rays and Neutrons Scattering, Springer, Berlin, 1992.
- (1992) Critical Phenomena at Surfaces and Interfaces-evanescent X-rays and Neutrons Scattering
- Dosch, H.¹

5
- 85166147009
- Y. Takamura, A.F. Marshall, A. Mehta, J. Arthur, P.B. Griffin, J.D. Plummer, J.R. Patel, J. Appl. Phys. 3968 (2004) 95.
- (2004) J. Appl. Phys. , vol.3968 , pp. 95
- Takamura, Y.¹ Marshall, A.F.² Mehta, A.³ Arthur, J.⁴ Griffin, P.B.⁵ Plummer, J.D.⁶ Patel, J.R.⁷

6
- 85166078295
- http://www.esrf.fr/exp.facilities/IDl/user_guide/.

7
- 85166132861
- P.H. Dederichs, J. Phys. F: Metal Phys. 471 (1973) 3.
- (1973) J. Phys. F: Metal Phys. , vol.471 , pp. 3
- Dederichs, P.H.¹

8
- 85166078248
- U. Beck, T.H. Metzger, J. Peisl, J.R. Patel, Appl. Phys. Lett. 2698 (2000) 76.
- (2000) Appl. Phys. Lett. , vol.2698 , pp. 76
- Beck, U.¹ Metzger, T.H.² Peisl, J.³ Patel, J.R.⁴

9
- 85166144781
- M. Sztucki, T.H. Metzger, l. Kegel, A. Tilke, J.L. Rouvière, D. Lübbert, J. Arthur, J. Patel, J. Appl. Phys. 3694 (2002) 92.
- (2002) J. Appl. Phys. , vol.3694 , pp. 92
- Sztucki, M.¹ Metzger, T.H.² Kegel, L.³ Tilke, A.⁴ Rouvière, J.L.⁵ Lübbert, D.⁶ Arthur, J.⁷ Patel, J.⁸

10
- 85166039964
- P. Ehrhart, T. Trinkaus, B.C. Larson, Phys. Rev. B 834 (1982) 25.
- (1982) Phys. Rev. B , vol.834 , pp. 25
- Ehrhart, P.¹ Trinkaus, T.² Larson, B.C.³

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