Yield evaluation of gold sensor electrodes used for fully electronic DNA detection arrays on CMOS

Microelectronics Reliability

Volumn 42, Issue 9-11, 2002, Pages 1801-1806

  Frey, A ^a   Hofmann, F ^a   Peters, R ^a   Holzapfl, B ^a   Schienle, M ^a   Paulus, C ^a   Schindler Bauer, P ^a   Kuhlmeier, D ^b   Krause, J ^b   Eckstein, G ^c   Thewes, R ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b November AG   (Germany)

^c SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DNA; ELECTRODES; GOLD;

BACK-END MODULES; DNA MOLECULES; ELECTRONIC DNA DETECTION; GOLD ELECTRODES; SENSOR ELECTRODES; SENSOR ELEMENTS; STANDARD CMOS PROCESS; TEST STRUCTURE;

CMOS INTEGRATED CIRCUITS;

EID: 10444280255     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(02)00234-2     Document Type: Conference Paper

References (4)

1. R. Hintsche et al., "Microbiosensors using electrodes made in Si-technology" in 'Frontiers in Biosensorics F, F. Scheller et al ed., 1997 Birkhäuser, Basel, Switzerland.
2. P. v. Gerwen, "Nanoscaled Interdigitated Elec-trode Arrays for Biochemical Sensors", Proc. Transducers "97, Chicago, 1997, p. 907.
3. R. Thewes et al, "Sensor Arrays for Fully Electronic DNA Detection on CMOS ", ISSCC Digest of Tech. Papers, 2002, p. 350.
4. F. Hofman et al., "Passive DNA Sensor with Gold Electrodes Fabricated in a CMOS Backend", to appear in Proc. ESSDERC, 2002