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Volumn 157-158, Issue SPEC. ISS., 2004, Pages 388-393
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Structure and properties of the Si3N4 nitride ceramics with hard wear resistant coatings
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Author keywords
CVD; Microhardness; Nitride ceramics; Scratch test; Si3N4 Multi layer coatings
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
ENERGY DISPERSIVE SPECTROSCOPY;
HIGH TEMPERATURE EFFECTS;
MICROHARDNESS;
MULTILAYERS;
PROTECTIVE COATINGS;
SCANNING ELECTRON MICROSCOPY;
SILICON COMPOUNDS;
WEAR RESISTANCE;
MULTI-LAYER COATINGS;
NITRIDE CERAMICS;
SCRATCH TEST;
SI3N4;
CERAMIC MATERIALS;
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EID: 10444252759
PISSN: 09240136
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jmatprotec.2004.09.060 Document Type: Conference Paper |
Times cited : (34)
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References (18)
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