Simulations of SEM imaging and charging

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 519, Issue 1-2, 2004, Pages 242-250

  Grella, Luca ^a   Lorusso, Gian ^a   Niemi, Tim ^a   Adler, David L ^a  

^a KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; ELECTRON SCATTERING; IMAGING TECHNIQUES; MONTE CARLO METHODS; RAY TRACING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES;

CONTACT IMAGING; SEMICONDUCTOR INDUSTRY;

ELECTRON BEAMS;

EID: 1042304346     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2003.11.161     Document Type: Conference Paper

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