High-Q integrated RF passives and micro-mechanical capacitors on silicon

Proceedings of the IEEE Bipolar/BiCMOS Circuits and Technology Meeting

Volumn , Issue , 2003, Pages 147-150

  Van Beek, J T M ^a   Van Delden, M H W M ^a   Van Dijken, A ^a   Van Eerd, P ^a   Van Grootel, M ^a   Jansman, A B M ^a   Kemmeren, A L A M ^a   Rijks, Th G S M ^a   Steeneken, P G ^a   Den Toonder, J ^a   Ulenaers, M ^a   Den Dekker, A ^b   Lok, P ^b   Pulsford, N ^b   Van Straten, F ^b   Van Teeffelen, L ^b   De Coster, J ^c   Puers, R ^c  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b NXP SEMICONDUCTORS   (Netherlands)

^c UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRIC INDUCTORS; ELECTRON IRRADIATION; IMPEDANCE MATCHING (ELECTRIC); INTEGRATED CIRCUITS; NANOTECHNOLOGY;

IMPEDANCE MATCHING CIRCUITS; MICROMECHANICAL CAPACITORS;

SEMICONDUCTING SILICON;

EID: 1042300817     PISSN: 10889299     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/bipol.2003.1274955     Document Type: Conference Paper

References (8)

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7. Mangiagalli et al., "A comparative study of radiation damage on high resistivity silicon", Eur.Phys.J. AP 6, p.121-130 (1999)
8. Nieminnen, H. et al. 2001, European Patent Application 01660182.5-2203