Metal-organic chemical vapour deposition of mixed-conducting perovskite oxide layers on monocrystalline and porous ceramic substrates

Thin Solid Films

Volumn 449, Issue 1-2, 2004, Pages 94-99

  Abrutis, A ^a   Bartasyte, A ^a   Garcia, G ^b   Teiserskis, A ^a   Kubilius, V ^a   Saltyte, Z ^a   Faucheux, V ^c   Figueras, A ^b,e   Rushworth, S ^d  

^a VILNIUS UNIVERSITY   (Lithuania)

^b INSTITUT DE CIÈNCIA DE MATERIALS DE BARCELONA ICMAB CSIC   (Spain)

^c Grenoble INP Phelma   (France)

^d Epichem Ltd   (United Kingdom)

^e CENTRO DE FÍSICA APLICADA Y TECNOLOGÍA AVANZADA   (Mexico)

Author keywords

Chemical vapor deposition (CVD); Coatings; Deposition process; Oxides

Indexed keywords

CERAMIC MATERIALS; CRYSTALLINE MATERIALS; MECHANICAL PERMEABILITY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PERMSELECTIVE MEMBRANES; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SYNTHESIS (CHEMICAL); THICKNESS MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

DEPOSITION PROCESS; PERMEABLE MEMBRANES;

PEROVSKITE;

EID: 1042292763     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)01404-4     Document Type: Article

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