Low power 2 × 2 thermo-optic SOI waveguide switch fabricated by anisotropy chemical etching

Optics Communications

Volumn 232, Issue 1-6, 2004, Pages 223-228

  Xia, Jinsong ^a   Yu, Jinzhong ^a   Wang, Zhangtao ^a   Fan, Zhongchao ^a   Chen, Shaowu ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

Anisotropy chemical etching; Multimode interferometer; Optical switch; Thermo optic; Waveguide

Indexed keywords

ANISOTROPY; DIFFRACTION GRATINGS; ELECTRIC POWER UTILIZATION; ETCHING; INTERFEROMETERS; OPTICAL COMMUNICATION; OPTICAL FIBER FABRICATION; OPTICAL WAVEGUIDES; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SWITCHING;

ANISOTROPY CHEMICAL ETCHING; MULTIMODE INTEFEROMETERS; THERMO-OPTICS;

OPTICAL SWITCHES;

EID: 1042288877     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2003.12.074     Document Type: Article

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