New description model of sputtering on material surface

Chinese Physics Letters

Volumn 20, Issue 7, 2003, Pages 1098-1101

  Deng, Bai Quan ^a   Yan, Jian Cheng ^a   Huang, Jin Hua ^a   Peng, Li Lin ^a  

^a SOUTHWESTERN INSTITUTE OF PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGED PARTICLES; STATISTICAL MECHANICS;

BIPARTITION; COMPONENT MATERIALS; DESCRIPTION METHOD; DESCRIPTION MODEL; EROSION RATES; ION-TRANSPORT; MATERIAL'S SURFACE; PLASMA-FACING COMPONENTS; SPUTTERING YIELDS; TRANSPORT THEORY;

SPUTTERING;

EID: 1042273217     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/20/7/337     Document Type: Article

References (13)

1. Cracken G and Stott P 1979 Nucl. Fusion 19 889
2. Roth J 1993 Impurity Generation Processes in Particle-Surface Interaction: Data Status and Needs, in Atomic and Plasma-Material Interaction Processes in Controlled Nuclear Fusion ed Janev R and Drawin H (Amsterdam: Elsevier)
3. Luo Z M and Wang S 1987 Phys. Rev. B 36 1885
4. Luo Z M and Hou Q 1993 J. Appl. Phys. 74 6007
5. Sigmund P 1969 Phys. Rev. 184 383
6. Sigmund P 1981 Sputtering by Ion Bombardment: Theoretical Concepts, Sputtering by Particle Bombardment ed Behrisch R (Berlin: Springer) vol 1, p 9
7. Luo Z M, Hou Q and Teng L 1996 Nucl. Instrum. Methods Phys. Res. B 115 497
8. Sigmund P 1981 Topics in Applied Physics I: Sputtering by Particle Bombardment ed Behrisch R vol 47 (Berlin: Springer)
9. Roth J 1986 Physics of Plasma- Wall Interactions in Controlled Fusion (New York: Plenum) 351
10. Deng B Q et al 2002 Chin. Phys. Lett. 19 962
11. Deng B Q, Bmmert G and Peng L L 2003 Chin. Phys. Lett. 20 544
12. Biersack J and Eckstein W 1984 Appl. Phys. A 34 73
13. Allain J and Ruzic D 2002 Nucl. Fusion 42 202