Anomalous electrical properties of dislocation slip plane in Si

EPJ Applied Physics

Volumn 27, Issue 1-3, 2004, Pages 349-351

  Eremenko, V G ^a   Yakimov, E B ^a  

^a INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; ELECTRIC PROPERTIES; ETCHING; IMPURITIES; PLASTIC DEFORMATION; SCANNING ELECTRON MICROSCOPY; STRESSES;

CHEMICAL ETCHING; DIRECT OBSERVATION OF DISLOCATIONS AND OTHER DEFECTS; DISCLINATIONS; LINEAR DEFECTS: DISLOCATIONS;

SCHOTTKY BARRIER DIODES;

EID: 10244260566     PISSN: 12860042     EISSN: None     Source Type: Journal    
DOI: 10.1051/epjap:2004149     Document Type: Conference Paper

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