Metrology of high aspect ratio MEMS

Microsystem Technologies

Volumn 10, Issue 6-7, 2004, Pages 556-559

  Nichols, J F ^a   Kurfess, T R ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; COMPUTER AIDED DESIGN; COMPUTER SOFTWARE; DATA REDUCTION; ERROR ANALYSIS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS;

COMPUTER AIDED INSPECTION (CAI); DATA SETS; GEOMETRIC ERRORS; SOFTWARE PLATFORM;

MICROELECTROMECHANICAL DEVICES;

EID: 10044275566     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0393-4     Document Type: Conference Paper

References (3)

1. Kim B; Razavi HA; Degertekin FL; Kurfess TR (2002) Micromachined interferometer for measuring dynamic response of microstructures. Proceedings of 2002 ASME International Mechanical Engineering Congress & Exposition, MEMS Symposium, New Orleans, LA
2. Claudet A (2001) Analysis of Three Dimensional Measurement Data and CAD Models. Ph.D. Thesis, Georgia Institute of Technology, Atlanta, GA
3. Marquardt D (1963) An algorithm for least-squares estimation of nonlinear parameters. SIAM J Appl Math 11: 431-441