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Volumn 13, Issue 4, 2004, Pages 20-21
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Depth-of-focus and the alternating phase-shift mask
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Author keywords
[No Author keywords available]
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Indexed keywords
COHERENT LIGHT;
DIFFRACTION;
FOCUSING;
LENSES;
LIGHT INTERFERENCE;
MASKS;
PHASE SHIFT;
DEPTH-OF-FOCUS;
PARTIAL COHERENCE;
PHASE SHIFTING MASK;
PHOTOLITHOGRAPHY;
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EID: 10044275332
PISSN: 1074407X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
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Times cited : (2)
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References (0)
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